Kwindawo yokufumba iifilimu ezincinci eguquka ngokukhawuleza,iithagethi zokutshiza ubhedu olucocekileyo kakhuluiyaqhubeka nokudlala indima ebalulekileyo ekuvumeleni ukwenziwa kwee-semiconductor eziphambili, iitekhnoloji zokubonisa, kunye nezisombululo zamandla avuselelekayo. Ngenxa yemfuno yehlabathi yezixhobo ze-elektroniki ezincinci, ezikhawulezayo, nezisebenzayo ngakumbi eziqhuba ukuveliswa kwezinto ezintsha, ukuqhuba kombane okugqwesileyo kwekopolo kunye nokuhambelana neenkqubo zokumisa umphunga ngokwasemzimbeni (i-PVD) kwenza ezi njongo zibe yinto engabalulekanga. Njengoko amaxabiso ekopolo ezinza kumanqanaba aphezulu ngo-2026, ingqwalasela kushishino itshintshele kwiinjongo ze-ultra-high-purity (4N–6N) eziqinisekisa iifilimu ezincinci ezingenasiphako kunye nemveliso yenkqubo ephezulu.

Eli nqaku lihlola iindlela eziphambili zokusebenzisa i-copper sputtering target, imisebenzi yazo ethile, amashishini aphambili okusetyenziswa, kunye neempawu zezinto ezibangela ukuba i-copper ingathathelwa indawo kwiimeko ezibalulekileyo zokusebenza okuphezulu.

Iintlobo ngeentlobo zeethagethi zokutshiza ezicocekileyo kakhulu, kuquka iipleyiti eziziingxande ezicwangcisiweyo, iimilo ezenziwe ngokwezifiso, kunye neendibano ezibotshelelweyo ezisetyenziswa kakhulu kwiinkqubo zokutshiza zemagnetron.

Iintlobo eziqhelekileyo zeeTargets zeCopper Sputtering kunye nemisebenzi yazo

Iithagethi zokutshiza ngekopolo zenziwe ngokweemfuno ezichanekileyo, ngesiqhelo ngamanqanaba obumsulwa angama-99.99% (4N) ukuya kuma-99.9999% (6N), ulwakhiwo lweenkozo ezincinci, kunye noxinano oluphezulu (>99%). Iifom eziphambili ziquka:

1. Iithagethi zePlanar(Iipleyiti ezizinxantathu okanye ezisikwere)Eyona ndlela ixhaphakileyo yokuseta iinkqubo zokutshiza zemagnetron ezisemgangathweni. Ezi thagethi zithe tyaba zibonelela ngokukhukuliseka okufanayo kunye nokusetyenziswa okuphezulu kwezinto ezisetyenziswayo kwiindawo ezinkulu zokugquma.
2. Iithagethi zeDiski ezijikelezayo Ilungele uphando, uphuhliso, kunye nee-cathode zemveliso ezincinci. Iidiski zibonelela ngokuhambelana okuhle kakhulu neemagnetron ezijikelezayo okanye ezimileyo, okuvumela ulawulo oluchanekileyo kubukhulu befilimu.
3. Iithagethi zeRotary (Cylindrical okanye Tubular)Yenzelwe iinkqubo zemagnetron ezijikeleziswayo, ezi zivumela amazinga aphezulu okusetyenziswa kwezinto (ukuya kuthi ga kwi-80–90%) xa kuthelekiswa neethagethi zeplanar, nto leyo eyenza ukuba zikhethwe kwiintambo zokugquma zoshishino ezinomthamo omkhulu.
4. Iithagethi eziDibeneyoIjolise kwiipleyiti ezixhasayo ze-indium-bond okanye ze-elastomer kwi-copper okanye i-molybdenum ukuze kuphuculwe ulawulo lobushushu kunye nokuzinza koomatshini ngexesha lokutshiza ngamandla aphezulu.

Ezi fom, ezifumaneka kwiithagethi zokutshiza ubhedu ezisemgangathweni nezenziwe ngokwezifiso, zenzelwe ukuzinza kweplasma, ukuvelisa amasuntswana amancinci, kunye namazinga okufaka ahlala ehleli.

Amashishini Aphambili Asebenzisa Iithagethi Zokutshiza Ubhedu Ngo-2026

Iithagethi zobhedu olucocekileyo kakhulu zibalulekile kumacandelo amaninzi akhula ngokukhawuleza:

• Ukuveliswa kweeSemiconductor→ Iifilimu zobhedu zisebenza njengeengqimba zembewu kunye neengqimba zokuthintela kwiinkqubo ze-damascene zokudibanisa kwiindawo eziphambili (sub-5nm).
• Imiboniso yePaneli eSicaba→ Isetyenziswa kwi-TFT-LCD, i-AMOLED, kunye nezibonisi eziguquguqukayo kwii-electrodes zesango, imigca yomthombo/yokukhupha amanzi, kunye neeleya ezibonisa ukukhanya.
• Iifotovoltaics→ Ibaluleke kakhulu kwi-CIGS (i-copper indium gallium selenide) iiseli zelanga ezithambileyo kunye nezakhiwo ze-perovskite tandem.
• Iingubo zokukhanya kunye neengubo zokuhombisa→ Isetyenziswa kwiglasi yoyilo, kwizipili zeemoto, kunye neengubo ezikhusela ukukhanya.
• Ugcino lweDatha kunye ne-MEMS→ Isebenza kwiinkqubo zokurekhoda ngemagnethi kunye neenkqubo ze-micro-electro-mechanical.

Ngenxa yokwanda okuqhubekayo kweetships ze-AI, iziseko zophuhliso ze-5G/6G, kunye namandla avuselelekayo, imfuno yezixhobo ezithembekileyoiithagethi zokutshiza ubhedu olucocekileyo kakhuluihlala iqinile.

Iingenelo Eziphambili Nesizathu Sokuba Ubhedu Luhlale Lungenakuthathelwa Indawo

Iithagethi zokutshiza ngekopolo zibonelela ngeenzuzo ezininzi zobugcisa ezingenakukwazi ukufana nezinye iindlela:

1. Ukuqhuba koMbane okuPhezulu— I-Copper inika amandla aphantsi okumelana (~1.68 µΩ·cm) phakathi kweentsimbi eziqhelekileyo, nto leyo evumela ukulibaziseka kwe-RC okuncitshisiweyo kunye nokusebenza okuphezulu kwesixhobo.
2. Ukufana Okugqwesileyo Kwefilimu Nokunamathela— Iithagethi ezicoliweyo zivelisa iifilimu ezixineneyo nezingenasiphako esiphantsi ezinemigangatho ephezulu yokufikelela kwinqanaba eliphezulu.
3. Ukuqhuba okuphezulu kobushushu— Inceda ekuchitheni ubushushu ngendlela efanelekileyo ngexesha lokutshiza, ivumela ubuninzi bamandla aphezulu kunye namazinga okufaka ngokukhawuleza.
4. Ukuhambelana neenkqubo ezikhoyo— Ukuhlanganiswa okungenamthungo kwiiseti zezixhobo zePVD ezivuthiweyo ezineengxaki ezincinci zokungqubana okanye zeesuntswana xa usebenzisa iithagethi ezikumgangatho ophezulu.
5. Ukulinganiswa okuSebenza ngexabiso— Nangona iindleko eziphezulu zezinto eziluhlaza, ubhedu lubonelela ngomlinganiselo ongcono kakhulu wokusebenza-ukuya kwixabiso kwimveliso yomthamo.

Ukungathathelwa indawo kwizicelo ezibalulekileyo: Nangona i-aluminium yayisetyenziswa ngaphambili kwii-interconnections, ukwamkelwa kwe-copper ngasekupheleni kweminyaka yoo-1990 (inkqubo ye-IBM ye-damascene) kwaphucula kakhulu isantya se-chip kunye nokusebenza kakuhle kwamandla—iingenelo ze-aluminium ezingenakuphinda ziphindaphindwe ngenxa yokumelana okuphezulu. Ezinye iindlela ezifana nesilivere zinengxaki yokufuduka kwe-electromigration, ngelixa i-ruthenium okanye i-cobalt zigcinelwe kuphela izithintelo ezincinci kakhulu. Kwii-semiconductor interconnects kunye nezicelo ze-high-frequency, ukufaka i-copper endaweni yayo kuya kwandisa ukusetyenziswa kwamandla, ukuvelisa ubushushu, kunye nobukhulu bokufa—okwenza ukuba ingabi nakutshintshwa ngempumelelo phantsi kweendlela zobuchwepheshe zangoku nezibonakalayo.

Imbonakalo: Ukuqinisekisa uBonelelo kwiMarike efunwa kakhulu

Njengoko izakhiwo zokwenza izinto zisiya kufikelela kwinqanaba le-angstrom ngokuchanekileyo ngo-2026, ukusebenzisana nababoneleli ababonelela ngeethagethi zethusi ezicocekileyo kakhulu, ulawulo oluchanekileyo lweenkozo, kunye nokulandeleka ngokupheleleyo kubaluleke kakhulu.

Sinezixhobo ezahlukeneyo zokutshiza ubhedu ezicwangcisiweyo, ezijikelezayo, nezenziwe ngokwezifiso, kunye nokuhanjiswa ngokukhawuleza kunye nenkxaso yobugcisa yobungcali.ikhathalogu ekujoliswe kuyo yokutshiza or nxibelelana neengcali zethukwizisombululo ezenzelwe wena kwi-semiconductor, display, okanye kwi-solar applications.

Iithagethi zokutshiza ubhedu olucocekileyo kakhulu ziyaqhubeka nokunika amandla ubuchwepheshe obubumba ikamva—zibonelela ngokusebenza okungenakulinganiswa nanto endaweni yako.